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Advanced materials for ULSI / Proceedings of the first International Symposium on... ; edited by Martin Scott, Yoichi Akasaka, Rafael Reif

Corporate Author (Main) International Symposium on Advanced Materials for ULSI, 1st= 1, 1987 Secondary Author Scott, Martin
Akasaka, Yoichi
Reif, Rafael
Language Inglês. Country Estados Unidos. Publication Pennington : The Electrochemical Society, cop. 1988 Description III, 246 p. : il. ; 23 cm Topical name Electroquímica - Tecnologia
- Simpósios
- [Actas]
CDU 621.35
061.3(73)"1987"
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Holdings
Item type Current location Call number Status Date due Barcode
Monografia U50 36359 GE Available 184491

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