International Symposium on Advanced Materials for ULSI, 1st= 1
Advanced materials for ULSI / Proceedings of the first International Symposium on... ; edited by Martin Scott, Yoichi Akasaka, Rafael Reif
Advanced materials for ULSI / Proceedings of the first International Symposium on... ; edited by Martin Scott, Yoichi Akasaka, Rafael Reif . - Pennington : The Electrochemical Society, cop. 1988 . - III, 246 p. : il. 23 cm Electroquímica - Tecnologia
- Simpósios
- [Actas]
621.35
061.3(73)"1987"
Advanced materials for ULSI / Proceedings of the first International Symposium on... ; edited by Martin Scott, Yoichi Akasaka, Rafael Reif . - Pennington : The Electrochemical Society, cop. 1988 . - III, 246 p. : il. 23 cm Electroquímica - Tecnologia
- Simpósios
- [Actas]
621.35
061.3(73)"1987"